X-RAY DETERMINATION OF STRAIN AND TEXTURE IN SPUTTERED MOLYBDENUM AND TITANIUM FILMS ON SILICON

被引：3

作者：

YESENSKY, RJ ^{[1
]}

RAO, V ^{[1
]}

HOUSKA, CR ^{[1
]}

机构：

[1] VIRGINIA POLYTECH INST & STATE UNIV,DIV MAT ENGN,BLACKSBURG,VA 24061

来源：

关键词：

D O I：

10.1016/0040-6090(81)90425-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：27 / 38

页数：12

共 11 条

ADLER, T ;

HOUSKA, CR .

BLACHMAN, AG .

METALLURGICAL TRANSACTIONS, 1971, 2 (03) :699-&

[3]

HILLEY ME, 1976, J784A SOC AUT ENG PU, P12

[4]

HOUSKA CR, 1980, TREATISE MATERIALS A, V19, P77

[5]

LOPATA SL, 1965, T METALL SOC AIME, V233, P288

[6]

RAO ST, UNPUBLISHED

[7]

Samsonov GV, 1968, HDB PHYSIOCHEMICAL P, P396

[8]

SMITHELLS CJ, 1967, METALS REFERENCE BOO, P140

[9] THERMALLY INDUCED STRAINS IN EVAPORATED FILMS [J].

VOOK, RW ;

WITT, F .

[10]

WARREN BE, 1968, XRAY DIFFRACTION, P35