CONTROLLED SPUTTERING OF METALS BY LOW-ENERGY HG IONS

被引：246
作者：
WEHNER, GK
机构：
来源：
PHYSICAL REVIEW | 1956年 / 102卷 / 03期
关键词：
D O I：
10.1103/PhysRev.102.690
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：690 / 704
页数：15
相关论文
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