CRYSTAL GROWTH AND ORIENTATION IN VACUUM-CONDENSED METAL DEPOSITS - A SYSTEMATIC CORRELATION WITH RESIDUAL PRESSURE, RATE OF DEPOSITION AND THICKNESS

被引:20
作者
PREECE, JB
WILMAN, H
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D O I
10.1088/0022-3727/2/7/303
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O59 [应用物理学];
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摘要
Extensive electron diffraction studies have been made of the surface structure of tin films condensed in vacuum on to glass substrates initially at room temperature. Rates of deposition were 0-150 Å s-1, film thicknesses up to 5000 Å and residual air pressures 10-8- 10-3 torr. The preferred orientation of the tin crystals depends systematically on the air pressure, as well as on the film thickness and rate of deposition. At 10-7 torr or less, at up to 70 Å s -1, the tin was very strongly oriented with {100} planes parallel to the substrate, but at 10-6-10-5 torr this was mixed with a less strong {001} orientation, and at higher pressures {001}, {301} or {110} orientation occurred in particular regions of the variables. These orientations other than {100} evidently arose because the corresponding plane faces were developed on the growing crystals, depending on the amount of adsorption of the residual gas on the crystal surface.
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共 19 条
[1]  
ACHARYA HK, 1948, THESIS U LONDON
[2]  
BLACKMAN M, 1959, STRUCTURE PROPERTIES, P217
[3]   EFFECT OF RESIDUAL GASES ON SUPERCONDUCTING CHARACTERISTICS OF TIN FILMS [J].
CASWELL, HL .
JOURNAL OF APPLIED PHYSICS, 1961, 32 (01) :105-&
[4]   CRYSTAL GROWTH AND ORIENTATION IN DEPOSITS CONDENSED FROM THE VAPOUR [J].
EVANS, DM ;
WILMAN, H .
ACTA CRYSTALLOGRAPHICA, 1952, 5 (06) :731-+
[5]  
FINCH GI, 1937, ERG EXAKT NATURWISS, V16, P353
[6]   THERMAL ASPECTS OF THE GROWTH OF THIN FILMS BY VACUUM SUBLIMATION [J].
GAFNER, G .
PHILOSOPHICAL MAGAZINE, 1960, 5 (58) :1041-1048
[7]  
HIRTH JP, 1963, CONDENSATION EVAPORT, V2
[8]  
MATTHEWS HI, 1962, 5 P INT C EL MICR NE
[9]   THE ORIGIN OF STRESS IN METAL LAYERS CONDENSED FROM THE VAPOUR IN HIGH VACUUM [J].
MURBACH, HP ;
WILMAN, H .
PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON SECTION B, 1953, 66 (407) :905-910
[10]  
NEUGABAUER CA, 1959, STRUCTURE PROPERTIES, P217