OPTICAL-PRECISION PROFILOMETER USING THE DIFFERENTIAL METHOD

被引：10
作者：
ADACHI, M
MIKI, H
NAKAI, Y
KAWAGUCHI, I
机构：
[1] KOBE STEEL LTD,CTR ELECTR TECHNOL,NADA KU,KOBE 657,JAPAN
[2] UNIV OSAKA PREFECTURE,SAKAI,OSAKA 591,JAPAN
来源：
OPTICS LETTERS | 1987年 / 12卷 / 10期
关键词：
D O I：
10.1364/OL.12.000792
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：792 / 794
页数：3
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[5]   OPTICAL HETERODYNE PROFILOMETRY [J].
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APPLIED OPTICS, 1981, 20 (04) :610-618
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