LASER ETCHING OF METALS IN NEUTRAL SALT-SOLUTIONS

被引：9

|

作者：

DATTA, M

ROMANKIW, LT

VIGLIOTTI, DR

VONGUTFELD, RJ

机构：

来源：

APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 24期

关键词：

D O I：

10.1063/1.98285

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：2040 / 2042

页数：3

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