LASER ETCHING OF METALS IN NEUTRAL SALT-SOLUTIONS

被引：9

作者：

DATTA, M

ROMANKIW, LT

VIGLIOTTI, DR

VONGUTFELD, RJ

机构：

来源：

APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 24期

关键词：

D O I：

10.1063/1.98285

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2040 / 2042

页数：3

共 10 条

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[2]

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[3]

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EHRLICH, DJ ;

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[7] LASER-CONTROLLED WET CHEMICAL ETCHING FOR CORRECTIVE TRIMMING OF THIN-FILMS - APPLICATION TO ALUMINUM [J].

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EHRLICH, DJ .

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[8] THE INITIATION OF SINGLE CORROSION SITES ON IRON BY FOCUSED LASER ILLUMINATION [J].

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CORROSION SCIENCE, 1983, 23 (11) :1153-1162

[9] LASER ENHANCED ETCHING IN KOH [J].

VONGUTFELD, RJ ;

HODGSON, RT .

APPLIED PHYSICS LETTERS, 1982, 40 (04) :352-354

[10] LASER-ENHANCED PLATING AND ETCHING - MECHANISMS AND APPLICATIONS [J].

VONGUTFELD, RJ ;

ACOSTA, RE ;

ROMANKIW, LT .

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