MOVPE INGAAS/INP GROWN DIRECTLY ON GAAS SUBSTRATES

被引:15
作者
DENTAI, AG [1 ]
JOYNER, CH [1 ]
TELL, B [1 ]
ZYSKIND, JL [1 ]
SULHOFF, JW [1 ]
FERGUSON, JF [1 ]
CENTANNI, JC [1 ]
CHU, SNG [1 ]
CHENG, CL [1 ]
机构
[1] AT&T BELL LABS,MURRAY HILL,NJ 07974
关键词
D O I
10.1049/el:19860813
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1186 / 1188
页数:3
相关论文
共 4 条
[1]   DEFECT STRUCTURE IN III-V-COMPOUND SEMICONDUCTORS - GENERATION AND EVOLUTION OF DEFECT STRUCTURES IN INGAAS AND INGAASP EPITAXIAL LAYER GROWN BY HYDRIDE TRANSPORT VAPOR-PHASE EPITAXY [J].
CHU, SNG ;
NAKAHARA, S ;
KARLICEK, RF ;
STREGE, KE ;
MITCHAM, D ;
JOHNSTON, WD .
JOURNAL OF APPLIED PHYSICS, 1986, 59 (10) :3441-3447
[2]  
CHU SNG, 1984, J ELECTROCHEM SOC, V131, P2663, DOI 10.1149/1.2115378
[3]  
RAZEGHI M, 1986, 169TH EL CHEM SOC M
[4]   VAPOR-PHASE EPITAXIAL-GROWTH AND CHARACTERIZATION OF INP ON GAAS [J].
TENG, SJJ ;
BALLINGALL, JM ;
ROSENBAUM, FJ .
APPLIED PHYSICS LETTERS, 1986, 48 (18) :1217-1219