KINETICS OF HYDROGEN DESORPTION ON A SI(111) SURFACE

被引:39
作者
MORITA, Y [1 ]
MIKI, K [1 ]
TOKUMOTO, H [1 ]
机构
[1] ELECTROTECH LAB,TSUKUBA,IBARAKI 305,JAPAN
关键词
D O I
10.1016/0039-6028(94)00706-3
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
An in situ observation of hydrogen (H) desorption on a Si(lll) surface was carried out by using high temperature scanning tunneling microscopy (STM). There appeared a disordered phase with no atomic images around 490 degrees C at which the surface monohydride started to desorb. When the sample temperature was maintained at a certain moment above 490 degrees C, the area of the disordered phase decreased with time and changed into a Si(111)-root 3 x root 3 R30 degrees structure. This behavior of the surface structure can be explained by the migration of SiH species on an unreconstructed Si(111)-1 x 1 surface at elevated temperature. Based on this behavior, we propose a model for the H desorption.
引用
收藏
页码:21 / 32
页数:12
相关论文
共 34 条
[1]  
BOLAND JJ, 1991, SURF SCI, V224, P1
[2]   HYDROGEN VIBRATION ON SI(111)7X7 - EVIDENCE FOR A UNIQUE CHEMISORPTION SITE [J].
CHABAL, YJ .
PHYSICAL REVIEW LETTERS, 1983, 50 (23) :1850-1853
[3]   HYDROGEN CHEMISORPTION ON SI(111)-(7X7) AND SI(111)-(1X1) SURFACES - A COMPARATIVE INFRARED STUDY [J].
CHABAL, YJ ;
HIGASHI, GS ;
CHRISTMAN, SB .
PHYSICAL REVIEW B, 1983, 28 (08) :4472-4479
[4]   HYDROGEN ADSORPTION ON SI(111)-(7X7) [J].
CULBERTSON, RJ ;
FELDMAN, LC ;
SILVERMAN, PJ ;
HAIGHT, R .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03) :868-871
[5]   SURFACE-DIFFUSION AND PHASE-TRANSITION ON THE GE(111) SURFACE STUDIED BY SCANNING TUNNELING MICROSCOPY [J].
FEENSTRA, RM ;
SLAVIN, AJ ;
HELD, GA ;
LUTZ, MA .
PHYSICAL REVIEW LETTERS, 1991, 66 (25) :3257-3260
[6]   ADSORPTION STATES AND ADSORPTION-KINETICS OF ATOMIC-HYDROGEN ON SILICON CRYSTAL-SURFACES [J].
FROITZHEIM, H ;
KOHLER, U ;
LAMMERING, H .
SURFACE SCIENCE, 1985, 149 (2-3) :537-557
[7]   DIFFUSION OF ADSORBATES ON METAL-SURFACES [J].
GOMER, R .
REPORTS ON PROGRESS IN PHYSICS, 1990, 53 (07) :917-1002
[8]   ABSOLUTE COVERAGE AND DECOMPOSITION KINETICS OF MONO-HYDRIDE, DI-HYDRIDE, AND TRI-HYDRIDE PHASES ON SI(111)-(7X7) [J].
GREENLIEF, CM ;
GATES, SM ;
HOLBERT, PA .
CHEMICAL PHYSICS LETTERS, 1989, 159 (2-3) :202-206
[9]  
HENZLER M, COMMUNICATION
[10]   HYDROGEN CHEMISORPTION ON SI(111) [J].
HO, KM ;
COHEN, ML ;
SCHLUTER, M .
PHYSICAL REVIEW B, 1977, 15 (08) :3888-3897