OPTICAL FUNCTIONS OF EPITAXIAL BETA-FESI2 ON SI(001) AND SI(111)

被引:20
作者
BELLANI, V
GUIZZETTI, G
MARABELLI, F
PATRINI, M
LAGOMARSINO, S
VONKANEL, H
机构
[1] CNR,IST ELETTR STATO SOLIDO,I-00156 ROME,ITALY
[2] ETH ZURICH,FESTKORPERPHYS LAB,CH-8093 ZURICH,SWITZERLAND
关键词
SEMICONDUCTORS; EPITAXY; OPTICAL PROPERTIES;
D O I
10.1016/0038-1098(95)00546-3
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
We accurately measured the complex refractive index and dielectric functions from 0.2 to 5 eV of high-quality beta-FeSi2 epitaxial films, with thicknesses ranging from 100 Angstrom to 8000 Angstrom, grown on Si(001) and Si(lll) using two different techniques. Reflectance, transmittance and spectroscopic ellipsometry were used and the spectra were analyzed within a multilayer model, by checking the Kramers-Kronig consistency of the derived optical functions. These functions, compared with previous results for polycrystalline samples, showed a very good agreement with those obtained for bulk samples and a significant difference to films. The nature (direct or indirect) of the lowest optical gap and the effects of the film thickness and the substrate orientation on the optical response were also investigated.
引用
收藏
页码:751 / 756
页数:6
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