MOLECULAR-DYNAMICS SIMULATION OF THIN-FILM FORMATION BY ENERGETIC CLUSTER IMPACT(ECI)

被引：52
作者：
HABERLAND, H
INSEPOV, Z
MOSELER, M
机构：
[1] UNIV FREIBURG,FAK PHYS,W-7800 FREIBURG,GERMANY
[2] KAZAKH POLYTECH INST,ALMA ATA,KAZAKHSTAN
来源：
ZEITSCHRIFT FUR PHYSIK D-ATOMS MOLECULES AND CLUSTERS | 1993年 / 26卷 / 1-4期
关键词：
D O I：
10.1007/BF01429153
中图分类号：
O64 [物理化学（理论化学）、化学物理学]; O56 [分子物理学、原子物理学];
学科分类号：
070203 ; 070304 ; 081704 ; 1406 ;
摘要：
Langevin Molecular Dynamics Simulations have been performed in order to understand thin film formation by impact of energetic clusters. The impact of Mo1024 clusters on a Mo surface is simulated at kinetic energies between 1 and 10 eV per atom. The results are in qualitative agreement with the experiments. Due to the high temperature induced locally at the impact zone, the method can be used to form compact, smooth, and strongly adhering thin films on room temperature substrates.
引用
收藏
页码：229 / 231
页数：3
相关论文
共 15 条
  • [1] AN IMPROVED N-BODY SEMIEMPIRICAL MODEL FOR BODY-CENTERED CUBIC TRANSITION-METALS
    ACKLAND, GJ
    THETFORD, R
    [J]. PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1987, 56 (01): : 15 - 30
  • [2] LARGER CLUSTER ION IMPACT PHENOMENA
    BEUHLER, R
    FRIEDMAN, L
    [J]. CHEMICAL REVIEWS, 1986, 86 (03) : 521 - 537
  • [3] MOLECULAR-DYNAMICS SIMULATIONS OF ENERGY-FLOW AT A SOLID-SURFACE - NEW METHODS USING A SMALL NUMBER OF ATOMS
    DEPRISTO, AE
    METIU, H
    [J]. JOURNAL OF CHEMICAL PHYSICS, 1989, 90 (02) : 1229 - 1236
  • [4] Even U., COMMUNICATION
  • [5] A SIMPLE EMPIRICAL N-BODY POTENTIAL FOR TRANSITION-METALS
    FINNIS, MW
    SINCLAIR, JE
    [J]. PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1984, 50 (01): : 45 - 55
  • [6] GIRAFALCO LA, 1959, PHYS REV, V114, P687
  • [7] THIN-FILMS FROM ENERGETIC CLUSTER IMPACT - A FEASIBILITY STUDY
    HABERLAND, H
    KARRAIS, M
    MALL, M
    THURNER, Y
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1992, 10 (05): : 3266 - 3271
  • [8] MOLECULAR-DYNAMICS SIMULATIONS OF COLLISIONS BETWEEN ENERGETIC CLUSTERS OF ATOMS AND METAL SUBSTRATES
    HSIEH, H
    AVERBACK, RS
    SELLERS, H
    FLYNN, CP
    [J]. PHYSICAL REVIEW B, 1992, 45 (08): : 4417 - 4430
  • [9] JONK P, 1992, P NATO ADV RES WORKS, V2, P1263
  • [10] MOLECULAR-DYNAMICS SIMULATION OF AMORPHOUS AND EPITAXIAL SI FILM GROWTH ON SI(111)
    KWON, I
    BISWAS, R
    GREST, GS
    SOUKOULIS, CM
    [J]. PHYSICAL REVIEW B, 1990, 41 (06): : 3678 - 3687
12