SOLID IMMERSION MICROSCOPE

被引：592
作者：
MANSFIELD, SM
KINO, GS
机构：
来源：
APPLIED PHYSICS LETTERS | 1990年 / 57卷 / 24期
关键词：
D O I：
10.1063/1.103828
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A new type of real-time optical microscope has been developed that operates on the same principle as a liquid immersion microscope, with the liquid replaced by a solid lens of high refractive index material. Using a lens with an index n=2 and 436 nm illumination, this microscope has resolved 100 nm lines and spaces and has demonstrated a factor of two improvement in the edge response over a confocal microscope.
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页码：2615 / 2616
页数：2
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