EFFECTS OF THE GROWTH-CONDITIONS ON DEEP LEVEL CONCENTRATION IN MOCVD GAAS

被引:37
作者
WATANABE, MO [1 ]
TANAKA, A [1 ]
NAKANISI, T [1 ]
ZOHTA, Y [1 ]
机构
[1] TOSHIBA CORP,TOSHIBA ELECTR EQUIP DIV,SAIWAI KU,KAWASAKI,KANAGAWA 210,JAPAN
关键词
D O I
10.1143/JJAP.20.L429
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:L429 / L432
页数:4
相关论文
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