THE FORMATION OF TI(OCN) LAYERS PRODUCED FROM METAL-ORGANIC COMPOUNDS USING PLASMA-ASSISTED CHEMICAL-VAPOR-DEPOSITION

被引：16

作者：

WIERZCHON, T

SOBIECKI, JR

KRUPA, D

机构：

[1] Faculty of Materials Science and Engineering, Warsaw University of Technology, 02-524 Warsaw

来源：

SURFACE & COATINGS TECHNOLOGY | 1993年 / 59卷 / 1-3期

关键词：

D O I：

10.1016/0257-8972(93)90086-4

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The paper describes the conditions necessary for producing surface layers on steel from a Ti(OiC3H7)4 + H-2 + N2 mixture using plasma-assisted chemical vapour deposition. It presents the results of metallographic and scanning microscopy examinations and of electron probe microanalysis. The hardness, the wear resistance measured by the ''three-rollers taper'' technique and the corrosion resistance measured using a potentiodynamic test are also given.

引用

页码：217 / 220

页数：4