A HEMISPHERICAL RETARDING-FIELD ENERGY ANALYZER WITH A MICROCHANNEL PLATE DETECTOR AND A HIGH EXTRACTION FIELD FOR VOLTAGE MEASUREMENT IN THE SCANNING ELECTRON-MICROSCOPE

被引：13

作者：

NAKAMAE, K ^{[1
]}

FUJIOKA, H ^{[1
]}

URA, K ^{[1
]}

TAKAGI, T ^{[1
]}

TAKASHIMA, S ^{[1
]}

机构：

[1] JEOL LTD,TOKYO 196,JAPAN

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1986年 / 19卷 / 10期

关键词：

HEMISPHERICAL RETARDING-FIELD - MICROCHANNEL PLATE DETECTOR - SCANNING ELECTRON MICROSCOPE;

D O I：

10.1088/0022-3735/19/10/017

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：847 / 852

页数：6

共 13 条

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[8] A NEW HEMISPHERICAL RETARDING-FIELD ENERGY ANALYZER FOR QUANTITATIVE VOLTAGE MEASUREMENTS IN THE SEM [J].

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[9] LOCAL FIELD EFFECTS ON VOLTAGE CONTRAST IN THE SCANNING ELECTRON-MICROSCOPE [J].

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[10] MEASUREMENTS OF DEEP PENETRATION OF LOW-ENERGY ELECTRONS INTO METAL-OXIDE-SEMICONDUCTOR STRUCTURE [J].

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FUJIOKA, H ;

URA, K .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (03) :1306-1308

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