PHOTOACOUSTIC MICROSCOPY OF AN INTEGRATED-CIRCUIT

被引：34
作者：
FAVRO, LD
KUO, PK
POUCH, JJ
THOMAS, RL
机构：
来源：
APPLIED PHYSICS LETTERS | 1980年 / 36卷 / 12期
关键词：
D O I：
10.1063/1.91662
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：953 / 954
页数：2
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[1]   OPTOACOUSTIC PHASE-ANGLE MEASUREMENT FOR PROBING A METAL [J].
BUSSE, G .
APPLIED PHYSICS LETTERS, 1979, 35 (10) :759-760
[2]   PHOTOACOUSTIC SIGNAL CHANGES ASSOCIATED WITH VARIATIONS IN SEMICONDUCTOR CRYSTALLINITY [J].
MCCLELLAND, JF ;
KNISELEY, RN .
APPLIED PHYSICS LETTERS, 1979, 35 (08) :585-587
[3]   SCANNING PHOTOACOUSTIC MICROSCOPY FOR NON-DESTRUCTIVE EVALUATION [J].
POUCH, JJ ;
THOMAS, RL ;
WONG, YH ;
SCHULDIES, J ;
SRINIVASAN, J .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1980, 70 (05) :562-564
[4]   SUBSURFACE FLAW DETECTION IN METALS BY PHOTOACOUSTIC MICROSCOPY [J].
THOMAS, RL ;
POUCH, JJ ;
WONG, YH ;
FAVRO, LD ;
KUO, PK ;
ROSENCWAIG, A .
JOURNAL OF APPLIED PHYSICS, 1980, 51 (02) :1152-1156
[5]   SUBSURFACE STRUCTURES OF SOLIDS BY SCANNING PHOTOACOUSTIC MICROSCOPY [J].
WONG, YH ;
THOMAS, RL ;
POUCH, JJ .
APPLIED PHYSICS LETTERS, 1979, 35 (05) :368-369
[6]   SURFACE AND SUBSURFACE STRUCTURE OF SOLIDS BY LASER PHOTOACOUSTIC SPECTROSCOPY [J].
WONG, YH ;
THOMAS, RL ;
HAWKINS, GF .
APPLIED PHYSICS LETTERS, 1978, 32 (09) :538-539
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