共 10 条
[5]
METTHEWS SM, 1981, SPIE, V275, P52
[6]
A PLASMA X-RAY SOURCE FOR X-RAY-LITHOGRAPHY
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1986, 4 (01)
:243-247
[7]
X-RAY-LITHOGRAPHY USING A PULSED PLASMA SOURCE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1981, 19 (04)
:1190-1193
[8]
PEARLMAN JS, 1985, P SOC PHOTO-OPT INST, V537, P102, DOI 10.1117/12.947490