共 10 条
- [3] FAST VALVE FOR GAS INJECTION INTO VACUUM [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1978, 49 (06) : 872 - 873
- [5] METTHEWS SM, 1981, SPIE, V275, P52
- [6] A PLASMA X-RAY SOURCE FOR X-RAY-LITHOGRAPHY [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (01): : 243 - 247
- [7] X-RAY-LITHOGRAPHY USING A PULSED PLASMA SOURCE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04): : 1190 - 1193
- [8] PEARLMAN JS, 1985, P SOC PHOTO-OPT INST, V537, P102, DOI 10.1117/12.947490