SHALLOW SB-DOPED SI SURFACE-LAYERS FORMED BY RECOIL IMPLANTATION

被引：1
作者：
KWOK, HL [1 ]
WONG, SC [1 ]
机构：
[1] CHINESE UNIV HONG KONG,DEPT ELECTR,SHATIN,HONG KONG
来源：
JOURNAL OF MATERIALS SCIENCE | 1989年 / 24卷 / 03期
关键词：
D O I：
10.1007/BF01148801
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：1073 / 1076
页数：4
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