SHALLOW SB-DOPED SI SURFACE-LAYERS FORMED BY RECOIL IMPLANTATION

被引：1

作者：

KWOK, HL ^{[1
]}

WONG, SC ^{[1
]}

机构：

[1] CHINESE UNIV HONG KONG,DEPT ELECTR,SHATIN,HONG KONG

来源：

JOURNAL OF MATERIALS SCIENCE | 1989年 / 24卷 / 03期

关键词：

D O I：

10.1007/BF01148801

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1073 / 1076

页数：4

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