A BUILT-IN UNIT FOR LOW-ENERGY AND HYPERTHERMAL ION BACKSCATTERING AND ION-NEUTRALIZATION SPECTROSCOPY

被引：0

作者：

ARISTARKHOVA, AA

VOLKOV, SS

TIMASHEV, MY

机构：

来源：

INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 1994年 / 37卷 / 02期

关键词：

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The unit is designed to provide a surface analysis by low-energy and hyperthermal ion scattering and ion-neutralization spectroscopy. The vacuum part of the unit is mounted on a single flange and includes an ion gun that generates a beam of noble gas 2-5000-eV ions with a current of 0.1 to 1000 nA and a diameter of 0.12-1 mm. The gun is placed inside a cylindrical analyzer and aligned with the axis. The input and output electric fields of the analyzer are reshaped in order to transmit low-energy charged particles. The emittance of the scattered beam of ions, whose energy distribution has a peak, is matched to the analyzer acceptance. The electronic hardware counts 1-10(6) pulse/sec from a secondary electron multiplier. The unit can operate in any vacuum chamber with a base pressure under 10(-5) Pa. The working gas (He, Ne) pressure is equal to or higher than 10(-3) Pa.

引用

页码：185 / 189

页数：5

共 12 条

[1]

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[2]

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[3]

ESPE V, 1962, TECHNOLOGY ELECTRONI, V1

[4]

EVSTIFEEV VV, 1989, 9TH P ALL UN C INT A, V1, P40