共 50 条
[24]
EXTREME ULTRAVIOLET-LASER ACTION IN PLASMAS
[J].
PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES,
1981, 300 (1456)
:631-640
[28]
VACUUM ULTRAVIOLET-LASER SPECTRA OF ICI
[J].
JOURNAL OF CHEMICAL PHYSICS,
1989, 90 (12)
:6821-6826
[30]
REACTION OF SILICON WITH CHLORINE AND ULTRAVIOLET-LASER INDUCED CHEMICAL ETCHING MECHANISMS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1989, 7 (05)
:1284-1294