FABRICATION OF IN0.25GA0.75AS/INGAASP STRAINED SWQ LASERS ON IN0.05GA0.95AS TERNARY SUBSTRATE

被引:31
作者
SHOJI, H
UCHIDA, T
KUSUNOKI, T
MATSUDA, M
KURAKAKE, H
YAMAZAKI, S
NAKAJIMA, K
ISHIKAWA, H
机构
[1] Fujitsu Laboratories Ltd., Atsugi
关键词
D O I
10.1109/68.329628
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A uniform In0.05Ga0.95As ternary substrate was grown by using liquid encapsulated Czochralski (LEC) technique with a method of supplying GaAs source material at a constant temperature, and InGaAs/InGaAsP strained single quantum well (SQW) lasers were fabricated on the substrate for the first time. The lasers lased at 1.03 mum and exhibited low threshold current density of 222 A/cm2 and excellent characteristic temperature of 221 K, showing that the ternary substrate has a sufficient quality for laser fabrication.
引用
收藏
页码:1170 / 1172
页数:3
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