TWO-DIMENSIONAL SIMULATION OF ION-IMPLANTATION PROFILES USING A PERSONAL-COMPUTER

被引：7
作者：
BARTHEL, A [1 ]
LORENZ, J [1 ]
RYSSEL, H [1 ]
机构：
[1] UNIV ERLANGEN NURNBERG,LEHRSTUHL ELEKTR BAUELEMENTE,D-8520 ERLANGEN,FED REP GER
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 37-8卷
关键词：
D O I：
10.1016/0168-583X(89)90193-6
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：312 / 316
页数：5
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NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 :45-49
[4]   MODELS FOR IMPLANTATION INTO MULTILAYER TARGETS [J].
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