Effect of substrate temperature on structural and substructural properties of MgO thin films

被引：6

作者：

Diachenko, O., V ^{[1
,3
]}

Opanasuyk, A. S. ^{[1
]}

Kurbatov, D., I ^{[1
]}

Kuznetsov, V. M. ^{[2
]}

Cheong, H. ^{[3
]}

机构：

[1] Sumy State Univ, 2 Rymsky Korsakov Str, UA-40007 Sumy, Ukraine

[2] Natl Acad Sci Ukraine, Inst Appl Sci, UA-40030 Sumy, Ukraine

[3] Sogang Univ, Dept Phys, Seoul 121742, South Korea

来源：

FUNCTIONAL MATERIALS | 2015年 / 22卷 / 04期

关键词：

magnesium oxide; spray pyrolysis technique; X-ray diffraction analysis; substructural characteristics; coherent scattering domain size; microstrain;

D O I：

10.15407/fm22.04.487

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this paper we have studied the influence of substrate temperature deposition on structural and substructural characteristics of magnesium oxide films by X-ray diffraction analysis. The thin films of MgO were prepared by spray pyrolysis technique from magnesium chloride solution. We have established the phase composition, the lattice constant, coherent scattering domain size, microstrain level of the films. The optimal conditions for the application of the homogeneous single-phase films of stoichiometric composition were identified.

引用

页码：487 / 493

页数：7

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