PARAMAGNETIC CENTERS OF AMORPHOUS-CARBON THIN-FILMS - INFLUENCE OF HYDROGEN CONTENT AND O2 PERMEATION

被引：35

作者：

HOINKIS, M ^{[1
]}

TOBER, ED ^{[1
]}

WHITE, RL ^{[1
]}

CROWDER, MS ^{[1
]}

机构：

[1] IBM CORP,ADSTAR,SAN JOSE,CA 95193

来源：

APPLIED PHYSICS LETTERS | 1992年 / 61卷 / 22期

关键词：

D O I：

10.1063/1.108098

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Electron paramagnetic resonance (EPR) studies of sputtered amorphous hydrogenated carbon (a-C:H) films have been conducted in several gaseous ambients, at three microwave frequencies, and as a function of film H content. Unpaired electron concentrations are found to decrease with increasing H content while EPR linewidths are shown to be a function of H content; unresolved proton hyperfine interaction is the linewidth determining factor for H content greater than 24% while conductivity is suggested to be the most significant linewidth determining factor for H content less than 24%. Furthermore, the EPR linewidth of a-C:H films broadens in the presence of gaseous O2 and demonstrates that these films are permeable to O2 and other gases.

引用

页码：2653 / 2655

页数：3

共 14 条

[1] THE INVESTIGATION OF FREE RADICALS TRAPPED IN LOW TEMPERATURE CARBONS [J].