PATTERNING OF CVD DIAMOND FILMS BY SEEDING AND THEIR FIELD-EMISSION PROPERTIES

Selective seeding for growing diamond on Si substrates was performed by conventional lithography using photoresist mixed with fine diamond particles. The selectivity was improved by filtering the diamond powder-photoresist mixture and carrying out reactive ion etching of patterned substrates. As a result, a selectivity up to 2.0 x 10(2) or higher was achieved. The resolution was of the order of 1 mum. Field emission from diamonds prepared using this selective growth method was observed without any postgrowth treatment. The measured current vs. voltage plot of a diode showed a rectifying characteristic. Under a forward bias, a current of about 15 muA was obtained at about 570 V, with a turn-on voltage of about 480 V. The emission current was comparable with that which had been observed for Si field emitter tips.