ELECTROMIGRATION AND LOW-FREQUENCY RESISTANCE FLUCTUATIONS IN ALUMINUM THIN-FILM INTERCONNECTIONS

被引：75
作者：
NERI, B
DILIGENTI, A
BAGNOLI, PE
机构：
来源：
IEEE TRANSACTIONS ON ELECTRON DEVICES | 1987年 / 34卷 / 11期
关键词：
D O I：
10.1109/T-ED.1987.23238
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：2317 / 2322
页数：6
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