FAST VALVE FOR GAS INJECTION INTO VACUUM

被引：26
作者：
FISHER, A
MAKO, F
SHILOH, J
机构：
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1978年 / 49卷 / 06期
关键词：
D O I：
10.1063/1.1135637
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：872 / 873
页数：2
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