X-RAY-DIFFRACTION INVESTIGATION OF DISLOCATIONS AT FILM-SUBSTRATE INTERFACE OF HOMOEPITAXIAL SILICON FILMS

被引：0
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作者：
ALTSHULE.VM
YUDINA, NI
FOKIN, AS
PAVLENKO, YS
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来源：
SOVIET PHYSICS SOLID STATE,USSR | 1972年 / 13卷 / 09期
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O469 [凝聚态物理学];
学科分类号：
070205 ;
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页码：2378 / +
页数：1
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