QUANTITATIVE STUDY OF AUGER-ELECTRON SIGNALS OF PHOSPHORUS ON SILICON USING A QUARTZ CRYSTAL MICROBALANCE

被引：23
作者：
LEVENSON, LL
BRYSON, CE
DAVIS, LE
MELLES, JJ
KOU, WH
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1972年 / 9卷 / 02期
关键词：
D O I：
10.1116/1.1317731
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：608 / &
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