REPETITIVE GROWTH STAGES IN SOLID-PHASE EPITAXY OF SILICON

被引：2
|
作者：
LIAU, ZL [1 ]
LAU, SS [1 ]
NICOLET, MA [1 ]
MAYER, JW [1 ]
机构：
[1] CALTECH,PASADENA,CA 91109
来源：
THIN SOLID FILMS | 1977年 / 44卷 / 02期
关键词：
D O I：
10.1016/0040-6090(77)90449-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：149 / 153
页数：5
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