LIGHT-ION SPUTTERING YIELDS FOR MOLYBDENUM AND GOLD AT LOW ENERGIES

被引：83

作者：

BAY, HL ^{[1
]}

ROTH, J ^{[1
]}

BOHDANSKY, J ^{[1
]}

机构：

[1] MAX PLANCK INST PLASMA PHYS,D-8046 GARCHING,FED REP GER

来源：

JOURNAL OF APPLIED PHYSICS | 1977年 / 48卷 / 11期

关键词：

D O I：

10.1063/1.323538

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4722 / 4728

页数：7

共 21 条

[11] SPUTTERING OF METALS BY HYDROGEN IONS [J].

KENKNIGHT, CE ;

WEHNER, GK .

JOURNAL OF APPLIED PHYSICS, 1964, 35 (02) :322-&

[12]

LINDHARD J, 1968, K DAN VIDENSK SELSK, V36

[13]

LITTMARK U, 1976, P SPIG, P139

[14]

MCCRACKEN GM, 1974, APPLICATION ION BEAM, P583

[15] SPUTTERING YIELDS FOR LOW ENERGY HE+-, KR+-, AND XE+-ION BOMBARDMENT [J].

ROSENBERG, D ;

WEHNER, GK .

JOURNAL OF APPLIED PHYSICS, 1962, 33 (05) :1842-&

[16]

SCHERZER BMU, 1976, INT S PLASMA WALL IN

[17] THEORY OF SPUTTERING .I. SPUTTERING YIELD OF AMORPHOUS AND POLYCRYSTALLINE TARGETS [J].

SIGMUND, P .

PHYSICAL REVIEW, 1969, 184 (02) :383-+

[18] CORRECTION [J].

SIGMUND, P .

APPLIED PHYSICS LETTERS, 1975, 27 (01) :52-52

[19] ENERGY DENSITY AND TIME CONSTANT OF HEAVY-ION INDUCED ELASTIC-COLLISION SPIKES IN SOLIDS [J].

SIGMUND, P .

APPLIED PHYSICS LETTERS, 1974, 25 (03) :169-171

[20] SPUTTERING YIELDS AT VERY LOW BOMBARDING ION ENERGIES [J].

STUART, RV ;

WEHNER, GK .

JOURNAL OF APPLIED PHYSICS, 1962, 33 (07) :2345-&

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