OPTICAL-CONSTANTS FOR SILICON AT 300-K AND 10-K DETERMINED FROM 1.64-EV TO 4.73-EV BY ELLIPSOMETRY

被引：159
作者：
JELLISON, GE
MODINE, FA
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 05期
关键词：
D O I：
10.1063/1.331113
中图分类号：
O59 [应用物理学];
学科分类号：
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页码：3745 / 3753
页数：9
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