AXIAL MICROSCOPIC DISTRIBUTION OF GROWN-IN DEFECTS IN CZOCHRALSKI-GROWN SILICON-CRYSTALS

被引：47

作者：

UMENO, S

SADAMITSU, S

MURAKAMI, H

HOURAI, M

SUMITA, S

SHIGEMATSU, T

机构：

[1] Silicon Technology Center, Sumitomo Sitix Corp., Kishima-gun, Saga, 849-05, Kohoku

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1993年 / 32卷 / 5B期

关键词：

SILICON; DEFECT; IR LIGHT SCATTERING TOMOGRAPHY; STRIATION; OXYGEN; MICROSCOPIC DISTRIBUTION; PREFERENTIAL ETCHING;

D O I：

10.1143/JJAP.32.L699

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The axial microscopic distribution of grown-in defects in Czochralski silicon was studied by means of IR light scattering tomography (LST) and preferential etching. IR scattering defects (defects observed with LST) were found to degrade the gate oxide integrity yield, and the axial density distribution of IR scattering defects and flow patterns (wedge-shaped etch patterns) fluctuated with oxygen concentration fluctuations along the growth axis. However, the defect density did not depend directly on oxygen concentration. It is considered that the formation of IR scattering defects is related to the solid-liquid intertace temperature fluctuations.

引用

页码：L699 / L702

页数：4

共 9 条

[1] EVALUATION OF INTERSTITIAL OXYGEN ALONG STRIATIONS IN CZ SILICON SINGLE-CRYSTALS WITH A MICRO-FTIR MAPPING SYSTEM
FUSEGAWA, I
YAMAGISHI, H
[J]. SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1992, 7 (1A) : A304 - A310
[2] EFFECT OF MICROSCOPIC GROWTH-RATE ON OXYGEN MICROSEGREGATION AND SWIRL DEFECT DISTRIBUTION IN CZOCHRALSKI-GROWN SILICON
MURGAI, A
GATOS, HC
WESTDORP, WA
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (12) : 2240 - 2245
[3] EFFECT OF CRYSTAL PULLING RATE ON FORMATION OF CRYSTAL-ORIGINATED PARTICLES ON SI WAFERS
RYUTA, J
MORITA, E
TANAKA, T
SHIMANUKI, Y
[J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1992, 31 (3B): : L293 - L295
[4] SADAMITSU S, UNPUB JPN J APPL PHY
[5] TACHIMORI H, 1990, 7TH P KESSH KOUG S J, P27
[6] NUCLEATION TEMPERATURE OF LARGE OXIDE PRECIPITATES IN AS-GROWN CZOCHRALSKI SILICON CRYSTAL
WADA, K
NAKANISHI, H
TAKAOKA, H
INOUE, N
[J]. JOURNAL OF CRYSTAL GROWTH, 1982, 57 (03) : 535 - 540
[7] INHOMOGENEITIES IN SILICON-CRYSTALS GROWN FROM THE MELT
WAKEFIELD, GF
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (05) : 1139 - 1143
[8] RECOGNITION OF D-DEFECTS IN SILICON SINGLE-CRYSTALS BY PREFERENTIAL ETCHING AND EFFECT ON GATE OXIDE INTEGRITY
YAMAGISHI, H
FUSEGAWA, I
FUJIMAKI, N
KATAYAMA, M
[J]. SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1992, 7 (1A) : A135 - A140
[9] Zulehner W., 1990, DEFECT CONTROL SEMIC, P143

← 1 →