THE EFFECT OF INDUCED AIR-FLOW ON THE SPIN COATING OF VISCOUS-LIQUIDS

被引：106

作者：

MIDDLEMAN, S

机构：

[1] UNIV CALIF SAN DIEGO,CTR MAGNET RECORDING RES,LA JOLLA,CA 92093

[2] UNIV CALIF SAN DIEGO,DEPT CHEM ENGN,LA JOLLA,CA 92093

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 06期

关键词：

D O I：

10.1063/1.339465

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2530 / 2532

页数：3

共 13 条

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[2] INVESTIGATION OF THE SOLVENT-EVAPORATION EFFECT ON SPIN COATING OF THIN-FILMS
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[J]. POLYMER ENGINEERING AND SCIENCE, 1983, 23 (07) : 399 - 403
[3] The flow due to a rotating disc.
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[4] AN INVESTIGATION OF THE THICKNESS VARIATION OF SPUN-ON THIN-FILMS COMMONLY ASSOCIATED WITH THE SEMICONDUCTOR INDUSTRY
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GIVENS, FL
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (01) : 173 - 179
[5] FLOW OF A VISCOUS LIQUID ON A ROTATING DISK
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PECK, LG
[J]. JOURNAL OF APPLIED PHYSICS, 1958, 29 (05) : 858 - 862
[6] MEASUREMENT OF THE VISCOSITY OF LIQUIDS IN VERY THIN-FILMS
ISRAELACHVILI, JN
[J]. JOURNAL OF COLLOID AND INTERFACE SCIENCE, 1986, 110 (01) : 263 - 271
[7] COATING FLOW OF NON-NEWTONIAN FLUIDS ON A FLAT ROTATING-DISK
JENEKHE, SA
SCHULDT, SB
[J]. INDUSTRIAL & ENGINEERING CHEMISTRY FUNDAMENTALS, 1984, 23 (04): : 432 - 436
[8] FLOW AND FILM THICKNESS OF BINGHAM PLASTIC LIQUIDS ON A ROTATING-DISK
JENEKHE, SA
SCHULDT, SB
[J]. CHEMICAL ENGINEERING COMMUNICATIONS, 1985, 33 (1-4) : 135 - 147
[9] EFFECTS OF SOLVENT MASS-TRANSFER ON FLOW OF POLYMER-SOLUTIONS ON A FLAT ROTATING-DISK
JENEKHE, SA
[J]. INDUSTRIAL & ENGINEERING CHEMISTRY FUNDAMENTALS, 1984, 23 (04): : 425 - 432
[10] SCHLICHTING M, 1960, BOUNDARY LAYER THEOR

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