THE POLYIMIDE (PMDA/ODA)-TITANIUM INTERFACE .1. UNTREATED PMDA/ODA - AN XPS, AES, AFM AND RAMAN-STUDY

被引:17
作者
GIRARDEAUX, C
DRUET, E
DEMONCY, P
DELAMAR, M
机构
[1] UNIV PARIS 07,INST TOPOL & DYNAM SYST,F-75005 PARIS,FRANCE
[2] IBM CORP,LAB ETUDE SURFACES & STRUCT,SERV 1807 31U,F-91105 CORBEIL ESSONNES,FRANCE
关键词
AES; AFM; PMDA/ODA; POLYIMIDE; RAMAN; XPS;
D O I
10.1016/0368-2048(94)02218-O
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
The interface between evaporated titanium and PMDA/ODA (pyromellitic dianhydride oxidianiline) polyimide is examined using several techniques: X-ray photoelectron spectroscopy, Auger spectroscopy, atomic force microscopy (AFM), Raman spectroscopy and peel strength measurements. The formation of small TiO2 particles at this interface (15-40 mu m diameter, about 30 nm thickness, covering about 6% of the interfacial area) is demonstrated. The failure is of cohesive type in the polymer layer. When the residual pressure during titanium evaporation is increased, the number of TiO2 particles increases, adhesion of the titanium layer is lowered and the locus of failure is closer to the metal layer.
引用
收藏
页码:11 / 21
页数:11
相关论文
共 34 条
[1]  
[Anonymous], 1992, HIGH RESOLUTION XPS, DOI 10.1021/ED070PA25.5
[2]  
[Anonymous], 1987, J ADHES SCI TECHNOL
[3]   ELECTRON INELASTIC MEAN FREE PATHS IN SEVERAL SOLIDS FOR 200 EV LESS-THAN-OR-EQUAL-TO E LESS-THAN-OR-EQUAL-TO 10 KEV [J].
ASHLEY, JC ;
TUNG, CJ .
SURFACE AND INTERFACE ANALYSIS, 1982, 4 (02) :52-55
[4]   PHOTOEMISSION SPECTROSCOPY STUDY OF ALUMINUM-POLYIMIDE INTERFACE [J].
BARTHA, JW ;
HAHN, PO ;
LEGOUES, F ;
HO, PS .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03) :1390-1393
[5]  
BODO P, 1990, ACS S SER, V440, pCH24
[6]   CHARACTERIZATION OF POROUS TITANIA GLASS - RAMAN, X-RAY-DIFFRACTION AND X-RAY PHOTOELECTRON SPECTROSCOPIC STUDIES [J].
CHEE, YH ;
COONEY, RP ;
HOWE, RF ;
VANDERHEIDE, PAW .
JOURNAL OF RAMAN SPECTROSCOPY, 1992, 23 (03) :161-166
[7]  
CHOU NJ, 1984, J VAC SCI TECHNOL A, V2, P751, DOI 10.1116/1.572564
[8]   AN XPS AND TEM STUDY OF INTRINSIC ADHESION BETWEEN POLYIMIDE AND CR FILMS [J].
CHOU, NJ ;
DONG, DW ;
KIM, J ;
LIU, AC .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (10) :2335-2340
[9]   ELECTRON VIBRATIONAL SPECTROSCOPY OF POLYMER VACUUM AND POLYMER METAL INTERFACES [J].
DINARDO, NJ ;
DEMUTH, JE ;
CLARK, TC .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :1050-1051
[10]   INFRARED SPECTROSCOPIC STUDY OF CR AND CU METALLIZATION OF POLYIMIDE [J].
DUNN, DS ;
GRANT, JL .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (02) :253-255