P-N-JUNCTIONS IN SURFACE REGION OF SILICON OBTAINED BY EVAPORATION OF SILICON IN ULTRAHIGH-VACUUM

被引:16
作者
ALEKSANDROV, LN
LOVYAGIN, RN
SIMONOV, PA
BZINKOVSKAYA, IS
机构
来源
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1978年 / 45卷 / 02期
关键词
D O I
10.1002/pssa.2210450220
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:521 / 527
页数:7
相关论文
共 8 条
[1]   EPITAXIAL GERMANIUM-SILICON STRUCTURES OBTAINED IN ULTRAHIGH-VACUUM [J].
ALEKSANDROV, LN ;
LOVYAGIN, RN .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1976, 37 (01) :341-352
[2]  
ALEKSANDROV LN, 1977, MIKROELEKTRONIKA, V6, P460
[3]   P-LAYERS ON VACUUM HEATED SILICON [J].
ALLEN, FG ;
BUCK, TM ;
LAW, JT .
JOURNAL OF APPLIED PHYSICS, 1960, 31 (06) :979-985
[4]  
Berman L. S., 1972, CAPACITANCE METHODS
[5]  
Bibik V. F., 1975, Ukrayins'kyi Fizychnyi Zhurnal, V20, P1684
[6]   CONTAMINANTS ON CHEMICALLY ETCHED SILICON SURFACES - LEED-AUGER METHOD [J].
CHANG, CC .
SURFACE SCIENCE, 1970, 23 (02) :283-&
[7]   CARBIDE CONTAMINATION OF SILICON SURFACES [J].
HENDERSON, RC ;
MARCUS, RB ;
POLITO, WJ .
JOURNAL OF APPLIED PHYSICS, 1971, 42 (03) :1208-+
[8]   TECHNIQUE FOR DIRECTLY PLOTTING DOPING PROFILE OF SEMICONDUCTOR WAFERS (8-SHAPED WAY) [J].
NAKHMANSON, RS .
SOLID-STATE ELECTRONICS, 1976, 19 (01) :87-91