A-SI-H PREPARED BY ION-BOMBARDMENT ACTIVATED HYDROGEN INCORPORATION DURING SI EVAPORATION

被引：4
作者：
STRAUVEN, H
STESMANS, A
WINTERS, J
SPINNEWIJN, J
VERBEKE, OB
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 07期
关键词：
D O I：
10.1063/1.339415
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：2836 / 2842
页数：7
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