DEPTH OF FOCUS AND THE MOMENT EXPANSION

被引：8

作者：

WANG, YT

PATI, YC

KAILATH, T

机构：

[1] Information Systems Laboratory, Stanford University, Stanford, CA

来源：

OPTICS LETTERS | 1995年 / 20卷 / 18期

关键词：

D O I：

10.1364/OL.20.001841

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We introduce the so-called moment expansion of a defocused image as a tool for analyzing and improving the depth of focus in optical imaging. It is shown that a number of previously noted defocus phenomena can be readily derived or explained in terms of moment expansion. Some potential applications of the moment expansion to phase-shifting mask and pupil filter design for optical lithography are also briefly noted. (C) 1995 Optical Society of America

引用

页码：1841 / 1843

页数：3

共 8 条

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[8]

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