DEPTH OF FOCUS AND THE MOMENT EXPANSION

被引：8
作者：
WANG, YT
PATI, YC
KAILATH, T
机构：
[1] Information Systems Laboratory, Stanford University, Stanford, CA
来源：
OPTICS LETTERS | 1995年 / 20卷 / 18期
关键词：
D O I：
10.1364/OL.20.001841
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We introduce the so-called moment expansion of a defocused image as a tool for analyzing and improving the depth of focus in optical imaging. It is shown that a number of previously noted defocus phenomena can be readily derived or explained in terms of moment expansion. Some potential applications of the moment expansion to phase-shifting mask and pupil filter design for optical lithography are also briefly noted. (C) 1995 Optical Society of America
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页码：1841 / 1843
页数：3
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