A COMPARISON OF THIN-FILM MEASUREMENT BY GUIDED-WAVES, ELLIPSOMETRY AND REFLECTOMETRY

被引：29
作者：
KING, RJ
TALIM, SP
机构：
来源：
OPTICA ACTA | 1981年 / 28卷 / 08期
关键词：
D O I：
10.1080/713820674
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：1107 / 1123
页数：17
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