A COMPARISON OF THIN-FILM MEASUREMENT BY GUIDED-WAVES, ELLIPSOMETRY AND REFLECTOMETRY

[1] EFFECT OF POLISHING TECHNIQUE ON ROUGHNESS AND RESIDUAL SURFACE FILM ON FUSED QUARTZ OPTICAL FLATS [J]. APPLIED OPTICS, 1970, 9 (01): : 236 - &

[2] BISPINCK H, 1967, OPTIK, V25, P237

[3] BOUSQUET P, 1956, OPT ACTA, V3, P153

[4] CLAPHAM PB, 1972, 1972 P EL OPT INT C, P277

[5] COLUMNAR MICROSTRUCTURE IN VAPOR-DEPOSITED THIN-FILMS [J]. THIN SOLID FILMS, 1977, 47 (03) : 219 - 233

[6] KERSTEN RT, 1975, OPT ACTA, V22, P515, DOI 10.1080/713819077

[7] KERSTEN RT, 1975, OPT ACTA, V22, P503, DOI 10.1080/713819078

[8] COMPARISON OF METHODS FOR ACCURATE FILM THICKNESS MEASUREMENT [J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1972, 5 (05): : 445 - &

[9] ELLIPSOMETRY APPLIED TO FILMS ON DIELECTRIC SUBSTRATES [J]. SURFACE SCIENCE, 1969, 16 : 288 - &

[10] MEASUREMEMT OF THICKNESS AND REFRACTIVE INDEX OF VERY THIN FILMS AND OPTICAL PROPERTIES OF SURFACES BY ELLIPSOMETRY [J]. JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS SECTION A-PHYSICS AND CHEMISTRY, 1963, A 67 (04): : 363 - +

[1] EFFECT OF POLISHING TECHNIQUE ON ROUGHNESS AND RESIDUAL SURFACE FILM ON FUSED QUARTZ OPTICAL FLATS [J]. APPLIED OPTICS, 1970, 9 (01): : 236 - &

[2] BISPINCK H, 1967, OPTIK, V25, P237

[3] BOUSQUET P, 1956, OPT ACTA, V3, P153

[4] CLAPHAM PB, 1972, 1972 P EL OPT INT C, P277

[5] COLUMNAR MICROSTRUCTURE IN VAPOR-DEPOSITED THIN-FILMS [J]. THIN SOLID FILMS, 1977, 47 (03) : 219 - 233

[6] KERSTEN RT, 1975, OPT ACTA, V22, P515, DOI 10.1080/713819077

[7] KERSTEN RT, 1975, OPT ACTA, V22, P503, DOI 10.1080/713819078

[8] COMPARISON OF METHODS FOR ACCURATE FILM THICKNESS MEASUREMENT [J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1972, 5 (05): : 445 - &

[9] ELLIPSOMETRY APPLIED TO FILMS ON DIELECTRIC SUBSTRATES [J]. SURFACE SCIENCE, 1969, 16 : 288 - &

[10] MEASUREMEMT OF THICKNESS AND REFRACTIVE INDEX OF VERY THIN FILMS AND OPTICAL PROPERTIES OF SURFACES BY ELLIPSOMETRY [J]. JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS SECTION A-PHYSICS AND CHEMISTRY, 1963, A 67 (04): : 363 - +