SURFACE SMOOTHNESS AND CRYSTALLINE-STRUCTURE OF ICB DEPOSITED TIO2 FILMS

被引：13

作者：

FUKUSHIMA, K ^{[1
]}

YAMADA, I ^{[1
]}

机构：

[1] KYOTO UNIV,ION BEAM ENGN EXPTL LAB,KYOTO 606,JAPAN

来源：

APPLIED SURFACE SCIENCE | 1989年 / 43卷

关键词：

D O I：

10.1016/0169-4332(89)90186-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：32 / 36

页数：5

共 12 条

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[3] CHARACTERISTICS OF TIO2 FILMS DEPOSITED BY A REACTIVE IONIZED CLUSTER BEAM [J].

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YAMADA, I ;

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[6] AL SURFACE MOBILITY ON SI(111) DURING INITIAL-STAGES OF IONIZED CLUSTER BEAM DEPOSITION [J].

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[7]

MACNEIL JR, 1984, APPL OPTICS, V23, P552

[8] ION-BEAM-ASSISTED DEPOSITION OF THIN-FILMS [J].

MARTIN, PJ ;

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PACEY, CG ;

SAINTY, WG .

APPLIED OPTICS, 1983, 22 (01) :178-184

[9] ION-ASSISTED DEPOSITION OF BULKLIKE ZRO2 FILMS [J].

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SIE, SH .

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[10] PROPERTIES OF ION PLATED OXIDE-FILMS [J].

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