MEASUREMENT OF SURFACE PHOTOVOLTAGE IN HIGH-RATE DEPOSITED A-SI-H FILMS AND COMPARISON WITH PHOTOTHERMAL DEFLECTION SPECTROSCOPY AND CONDUCTIVITY DATA

被引:1
|
作者
SCHWARZ, R [1 ]
GOEDECKER, S [1 ]
MUSCHIK, T [1 ]
WYRSCH, N [1 ]
SHAH, AV [1 ]
CURTINS, H [1 ]
机构
[1] UNIV NEUCHATEL,INST MICROTECH,CH-2000 NEUCHATEL,SWITZERLAND
关键词
D O I
10.1016/0022-3093(87)90179-7
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:759 / 762
页数:4
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