GENERAL-ASPECTS OF TRACE ANALYTICAL METHODS .8. DISTRIBUTION ANALYSIS OF MAJOR AND TRACE-ELEMENTS THROUGH SEMICONDUCTOR LAYERS OF CHANGING MATRIX USING SECONDARY ION MASS-SPECTROMETRY (SIMS)

被引：13

作者：

GALUSKA, AA ^{[1
]}

MORRISON, GH ^{[1
]}

机构：

[1] CORNELL UNIV,DEPT CHEM,ITHACA,NY 14853

来源：

PURE AND APPLIED CHEMISTRY | 1987年 / 59卷 / 02期

关键词：

D O I：

10.1351/pac198759020229

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：229 / 244

页数：16

共 40 条

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