AN X-RAY MICROCALORIMETER WITH KINETIC INDUCTANCE THERMOMETER AND DC SQUID READ-OUT

被引：7
|
作者：
OSTERMAN, DP [1 ]
PATT, R [1 ]
AUDLEY, D [1 ]
KELLEY, R [1 ]
机构：
[1] NASA,GODDARD SPACE FLIGHT CTR,GREENBELT,MD 20771
来源：
JOURNAL OF LOW TEMPERATURE PHYSICS | 1993年 / 93卷 / 3-4期
关键词：
D O I：
10.1007/BF00693428
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
This article reports on the development of a microcalorimeter for X-ray spectroscopy Which uses a superconducting kinetic inductance thermometer. The monolithic construction combines the thermometer and all other components on a single substrate. These include a dc SQUID for measuring the thermometer output, and a micromachined ''leg and panel'' structure for low thermal conductance and capacitance. An all-niobium prototype has been fabricated, and its operation verified qualitatively above 4 K
引用
收藏
页码：251 / 256
页数：6
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