REDUCED SILICON MOVEMENT IN GAINAS/ALINAS HEMT STRUCTURES WITH LOW-TEMPERATURE ALINAS SPACERS

被引：0
|
作者：
BROWN, AS
NGUYEN, LD
METZGER, RA
MATLOUBIAN, M
SCHMITZ, AE
LUI, M
WILSON, RG
HENIGE, JA
机构：
来源：
INSTITUTE OF PHYSICS CONFERENCE SERIES | 1992年 / 120期
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D O I：
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中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
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页码：281 / 286
页数：6
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