COMPUTER-SIMULATION OF ION-BEAM ENHANCED DEPOSITION OF SILICON-NITRIDE FILMS

被引：0
|
作者：
ZHOU, JK
CHEN, YS
LIU, XH
ZOU, SC
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 39卷 / 1-4期
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：182 / 184
页数：3
相关论文
共 50 条
  • [41] COMPUTER-SIMULATION OF ION-BEAM EXTRACTION BY FINITE-ELEMENT METHOD
    MORI, M
    NAKAMURA, T
    INOUE, N
    UCHIDA, T
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1980, 19 (07) : 1377 - 1382
  • [42] Computer simulation of multicomponent ion beam enhanced deposition of (TiMo) N films
    Li, GQ
    Ma, TC
    Zhang, T
    Tang, BY
    Chu, PK
    SURFACE & COATINGS TECHNOLOGY, 1998, 110 (1-2): : 1 - 3
  • [43] ION-BEAM DEPOSITION OF HYDROGENATED AMORPHOUS-SILICON FILMS
    KASDAN, A
    GOSHORN, DP
    LANFORD, WA
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03): : 305 - 306
  • [44] SYNTHESIS OF IRON-NITRIDE FILMS BY MEANS OF ION-BEAM DEPOSITION
    TERADA, N
    HOSHI, Y
    NAOE, M
    YAMANAKA, S
    IEEE TRANSACTIONS ON MAGNETICS, 1984, 20 (05) : 1451 - 1453
  • [45] ION-BEAM ENHANCED DEPOSITION OF TITANIUM-NITRIDE ON INCONEL 718
    SRIDHARAN, K
    WALTER, KC
    CONRAD, JR
    MATERIALS RESEARCH BULLETIN, 1991, 26 (05) : 367 - 373
  • [46] SYNTHESIS OF SILICON-NITRIDE AND SILICON-OXIDE FILMS BY ION-ASSISTED DEPOSITION
    NETTERFIELD, RP
    MARTIN, PJ
    SAINTY, WG
    APPLIED OPTICS, 1986, 25 (21): : 3808 - 3809
  • [47] REACTIVE ION-BEAM DEPOSITION OF ALUMINUM NITRIDE THIN-FILMS
    BHAT, S
    ASHOK, S
    FONASH, SJ
    TONGSON, L
    JOURNAL OF ELECTRONIC MATERIALS, 1985, 14 (04) : 405 - 418
  • [48] Ion-beam Assisted Magnetron Sputtering Deposition of Titanium Nitride Films
    He, Huang
    Xuegang, Wang
    Xiaodong, Zhu
    Hua, Chen
    Jiawen, He
    Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering, 2002, 31 (03):
  • [49] Silicon nitride films produced by ion-beam assisted deposition: Bulk and near-surface composition
    Grigorov, GI
    Grigorov, KG
    Bouchier, D
    Vignes, JL
    Langeron, JP
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1996, 108 (1-2): : 85 - 86
  • [50] PROPERTIES OF ION-BEAM SYNTHESIZED BURIED SILICON-NITRIDE LAYERS WITH RECTANGULAR NITROGEN PROFILES
    SKORUPA, W
    WOLLSCHLAGER, K
    KREISSIG, U
    GROTZSCHEL, R
    BARTSCH, H
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 : 285 - 289
12345