COMPUTER-SIMULATION OF ION-BEAM ENHANCED DEPOSITION OF SILICON-NITRIDE FILMS

被引：0
|
作者：
ZHOU, JK
CHEN, YS
LIU, XH
ZOU, SC
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 39卷 / 1-4期
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中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
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页码：182 / 184
页数：3
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