COMPUTER-SIMULATION OF ION-BEAM ENHANCED DEPOSITION OF SILICON-NITRIDE FILMS

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作者：

ZHOU, JK

CHEN, YS

LIU, XH

ZOU, SC

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NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 39卷 / 1-4期

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TH7 [仪器、仪表];

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0804 ; 080401 ; 081102 ;

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页码：182 / 184

页数：3

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