AZIMUTHAL MISALIGNMENT AND SURFACE ANISOTROPY AS SOURCES OF ERROR IN ELLIPSOMETRY

被引：33

作者：

DIGNAM, MJ

MOSKOVIT.M

机构：

来源：

APPLIED OPTICS | 1970年 / 9卷 / 08期

关键词：

D O I：

10.1364/AO.9.001868

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

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页码：1868 / &

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