AN EXPERIMENTAL 1-MBIT BICMOS DRAM

被引:12
|
作者
KITSUKAWA, G [1 ]
HORI, R [1 ]
KAWAJIRI, Y [1 ]
WATANABE, T [1 ]
KAWAHARA, T [1 ]
ITOH, K [1 ]
KOBAYASHI, Y [1 ]
OOHAYASHI, M [1 ]
ASAYAMA, K [1 ]
IKEDA, T [1 ]
KAWAMOTO, H [1 ]
机构
[1] HITACHI LTD,CTR DEVICE DEV,OUME,TOKYO 198,JAPAN
关键词
DATA STORAGE; SEMICONDUCTOR - SEMICONDUCTOR DEVICES; BIPOLAR - SEMICONDUCTOR DEVICES; MOS;
D O I
10.1109/JSSC.1987.1052796
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Three developments are proposed for high-performance DRAMs: a bipolar complementary MOS (BiCMOS) DRAM device structure featuring high soft-error immunity due to a P** plus buried layer; a high-speed circuit configuration of eight NMOS subarrays combined with BiCMOS peripheral drivers and BiCMOS data output circuitry; and BiCMOS voltage and current limiters lowering power dissipation as well as peak current. A 1. 3- mu m 1-Mb DRAM is designed and fabricated to verify the usefulness of these BiCMOS DRAM technologies. Features of this chip include a typical access time of 32 ns, a typical power dissipation of 450 mW at a 60-ns cycle time, and chip size of 5. 0 multiplied by 14. 9 mm**2.
引用
收藏
页码:657 / 662
页数:6
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