STATIONARY DEPTH-PROFILING REFLECTOMETER BASED ON LOW-COHERENCE INTERFEROMETRY

被引：4
|
作者：
KNUTTEL, A
SCHMITT, JM
机构：
[1] National Institutes of Health, Bethesda
来源：
OPTICS COMMUNICATIONS | 1993年 / 102卷 / 3-4期
关键词：
D O I：
10.1016/0030-4018(93)90380-N
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Described is a new optical reflectometer based on low-coherence interferometry that employs no moving parts. Depth profiling up to a maximum free-space distance of 300 mum ( 150 mum depth) was achieved with a spatial resolution of 23 mum. In a proof-of-principle application, the thickness of a thin plastic film was determined.
引用
收藏
页码：193 / 198
页数：6
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