ELECTRON-ENERGY DISTRIBUTION FUNCTION IN DECAYING NITROGEN PLASMAS

被引:59
作者
DYATKO, NA
KOCHETOV, IV
NAPARTOVICH, AP
机构
[1] Branch of Kurchatov Atomic Energy, Inst, Moscow
关键词
D O I
10.1088/0022-3727/26/3/011
中图分类号
O59 [应用物理学];
学科分类号
摘要
The electron energy distribution function (EEDF) in decaying nitrogen plasmas is investigated numerically. The comparison of the calculated and experimentally measured EEDF allows a correction to be made to the cross sectional magnitude for electron scattering from vibrationally excited molecules. The influence of electron-electron (e-e) collisions on the EEDF is investigated. It is shown that e-e collisions may have a strong influence on the EEDF in decaying plasmas even at very low degrees of ionization (2 x 10(-6)).
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页码:418 / 423
页数:6
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